China has successfully localized immersion DUV (deep ultraviolet) lithography equipment, with the developer identified as AISENNA, a company established in Shanghai.
According to Reuters, citing anonymous sources, AISENNA Electronic Technology Group, a state-owned enterprise, is producing immersion DUV lithography machines by recruiting experts in the field within China.
AISENNA was founded in August 2023 with a capital of 7 billion yuan (approximately $1.5 billion). Shanghai Micro Electronics Equipment (SMEE) holds a 50% stake, while the Shanghai International Trust, a government-owned entity, owns the other 50%. Both are state-owned enterprises. AISENNA has reportedly recruited development teams from SMEE and Yuliangsheng, both of which are involved in lithography equipment development. Yuliangsheng is considered a subsidiary of the semiconductor equipment company, Sinokairai, which is affiliated with Huawei.
This establishment of AISENNA in 2023 is seen as a strategic move by China to accelerate the development of DUV equipment by integrating the development teams from SMEE and Yuliangsheng.
Earlier, U.S. IT media outlet The Information reported on July 28 that a Chinese semiconductor equipment company is producing immersion DUV machines, planning to ship five units this year and 20 units next year, although the company's name was not disclosed.
If China's production of immersion DUV machines is confirmed, it would mark a historic technological breakthrough. Associate Professor Fu Fangjian from Singapore Management University stated in an interview with the United Daily News that this could be a significant breakthrough for China in overcoming U.S. technological pressures.
Additionally, Zhang Pan, founder of Advantage Research Consulting based in Singapore, noted, "If China successfully produces DUV machines, it will only be a matter of time before it breaks through the 7-nanometer semiconductor process technology. Accelerating the development of lithography technology could pose a substantial threat to the U.S.-led global semiconductor ecosystem."
* This article has been translated by AI.
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