South Korea Streamlines EUV Equipment Import Process for Semiconductor Production

by Kim SeongSeo Posted : June 2, 2026, 15:39Updated : June 2, 2026, 15:39
Aerial view of the Yongin Semiconductor Cluster
Aerial view of the Yongin Semiconductor Cluster [Photo=Yongin City]
The South Korean government is significantly simplifying the domestic import procedures for extreme ultraviolet (EUV) equipment to support the growing semiconductor production for artificial intelligence (AI) exports. As a result, the import timeline will be reduced from 34 days to just 9 days, with an expected cost savings of approximately 500 million won (about $375,000).
On June 2, the Ministry of Trade, Industry and Energy announced that the Cabinet approved amendments to the High-Pressure Gas Safety Management Law. The key change allows semiconductor manufacturing equipment that meets global safety standards to be classified under specific equipment criteria rather than general manufacturing facilities for high-pressure gas.
Recently, semiconductor exports have been a driving force for the South Korean economy. Last month, semiconductor exports reached $37.16 billion, a staggering 169.4% increase compared to the previous year, largely due to increased capital investments from major U.S. tech companies and sustained rises in memory fixed prices.
There are predictions that South Korea's exports, led by semiconductors, could achieve the ambitious target of $1 trillion. However, while companies are increasing imports of essential equipment for advanced semiconductor production lines, delays in equipment installation have been a concern.
In response, the government has decided to streamline the import procedures for EUV equipment, which is crucial for semiconductor manufacturing. This initiative aims to ensure that domestic semiconductor companies can timely acquire and quickly operate advanced manufacturing equipment, thereby maintaining the industry's competitive edge.
Previously, EUV equipment was classified as high-pressure gas manufacturing equipment due to the inclusion of high-pressure gas piping and devices. Each installation required technical reviews, interim inspections, and final inspections, extending the import process to about 34 days. The interim inspection process also necessitated pressure-tightness testing by overseas accredited inspection agencies, resulting in inspection costs of 500 million won per unit.
Comparison of EUV Equipment Inspection Procedures Before and After Improvements
Comparison of EUV Equipment Inspection Procedures Before and After Improvements. [Photo=Ministry of Trade, Industry and Energy]
The Ministry of Trade, Industry and Energy has gathered feedback from the semiconductor industry through multiple consultations to address on-site challenges. It also carefully reviewed the alignment between global safety standards and domestic safety management systems, deciding to manage the safety of EUV equipment under specific equipment criteria.
As a result, the technical review period will be reduced from 15 days to 2 days, interim inspections will be eliminated, and the final inspection period will be shortened from 7 days to 2 days. The total time required for the import process is expected to decrease from 34 days to 9 days, alleviating the financial burden associated with interim inspections.
Additionally, new tailored inspection standards will be established to facilitate the commercialization of eco-friendly liquefied carbon dioxide cleaning equipment, which uses carbon dioxide instead of water and detergents. The safety management criteria for commercial liquefied carbon dioxide cleaning equipment and low-risk high-pressure gas facilities have also been revised to better reflect current realities.
The amendments will be announced next week and will take effect immediately. Minister of Trade, Industry and Energy Kim Jeong-kwan stated, "This legislative amendment is a prime example of regulatory innovation aimed at simultaneously ensuring safety and enhancing the competitiveness of advanced industries. We will actively support investments in advanced industries through a rational safety management system that aligns with global standards."



* This article has been translated by AI.