China has localized a high-end transmission electron microscope (TEM) necessary for atomic-level analysis of semiconductors and advanced materials.
Guoyangzi (CIQTEK), a Chinese scientific instrument manufacturer, unveiled its 200kV field emission transmission electron microscope, the 'TEM-F200,' at the 2026 National Electron Microscopy Academic Conference held in Nanjing on October 18. The product has received significant praise within China's semiconductor industry, according to Shanghai Securities News on October 22.
The TEM-F200 achieves an information resolution of 0.1 nanometers (nm) and a point resolution of 0.25 nm, reaching a stage suitable for mass production and delivery. Guoyangzi, based in Hefei, Anhui Province, has developed capabilities in research, manufacturing, sales, and service of precision analysis equipment, including electron microscopes. The company claims to have independently developed everything from core modules to control and analysis software and system integration, addressing the technical challenges of stabilizing components such as the electron gun, high-voltage power supply, electron optics, and detectors in a 200kV device.
In the semiconductor industry, transmission electron microscopes are essential analytical tools for examining the microstructure within chips. They allow for high-resolution observation of semiconductor cross-sections, enabling analysis of transistor structures, thin film thickness, material interfaces, and crystal arrangements. They are also used to identify the causes of minute voids, defects, and impurities that occur during processing, validating the performance and reliability of devices. As miniaturization progresses, the ability to accurately identify defect causes becomes crucial for yield and competitiveness in advanced process development.
In the global market, major suppliers include Thermo Fisher Scientific from the United States and Japan's JEOL and Hitachi. The flagship products of these companies in the 200kV range have information resolutions of approximately 0.11 to 0.12 nm, making Guoyangzi's new product competitive with leading global offerings in key performance metrics. This localization allows Chinese semiconductor companies to reduce their dependence on foreign suppliers not only for equipment purchases but also for core component procurement, maintenance, and software support.
* This article has been translated by AI.
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